Patent · US Active

Method and device for depositing a nano-object

US11854801B2 · kind B2 · utility

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32Claims

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Assignees

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE · FR
ECOLE NORMALE SUPERIEURE · FR
Sorbonne Universite · FR
UNIVERSITÉ PARIS CITÉ · FR

Inventors

Matthieu DELBECQ · Antony, FR
Tino Cubaynes · Jungholtz, FR
Jose Medina Palomo · Argenteuil, FR
Matthieu C. Dartiailh · New York, US
Takis KONTOS · Paris, FR
Matthieu Desjardins · Paris, FR

Key dates

Filing date	Oct 18, 2019
Grant date	Dec 26, 2023
Priority date	—
Expiry date	Oct 26, 2040

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0109
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for depositing an object, including: —approaching, in an enclosure, a holder in the direction of a carrier substrate, then—transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10−6 bar.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.