System for monitoring environment
US11854845B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2021 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | Mar 10, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/2247
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for monitoring an environment can be used for monitoring concentrations of airborne contaminants in a plurality of process areas in a clean room. The system includes: a sampling device, configured to collect environmental samples from process areas and including a system sampling pipeline, the environmental sample including air; an analysis device, connected to an output end of the system sampling pipeline; an air supply device, connected to the system sampling pipeline and configured to provide a purge gas to the system sampling pipeline; and a humidification device, configured to provide water mist and connected between the air supply device and the system sampling pipeline.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.