System for a semiconductor fabrication facility and method for operating the same
US11854846B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 29, 2022 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | Jun 29, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for a semiconductor fabrication facility includes a maintenance tool, a control unit, a first track, a second track, a maintenance crane movably mounted on the first track, a plurality of first sensors disposed on the first track, an OHT vehicle movably mounted on the second track, and a second sensor on the OHT vehicle. The first sensors detect a location of the maintenance crane and generate a first location data to the control unit. The second sensor generates a second location data to the control unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.