Method for producing an electrically conductive connection on a substrate, microelectronic device and method for the production thereof
US11855037B2 · kind B2 · utility
0Cited by
2References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2019 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | Jul 20, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/82805
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a method (110) for producing an electrically conductive connection (112, 112′) on a substrate (114), comprising the following steps: The invention furthermore relates to a method for producing a microelectronic device (124) and to a microelectronic device (124), in particular a transistor (130).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.