Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
US11855602B2 · kind B2 · utility
1Cited by
28References
28Claims
0Family size
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Key dates
| Filing date | Feb 10, 2021 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | Feb 17, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0478
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
There is disclosed acoustic resonators and filter devices. An acoustic resonator device includes a piezoelectric plate, and an interdigital transducer (IDT) formed on a front surface of the piezoelectric plate. The IDT includes interleaved fingers. At least one of the interleaved fingers includes a first layer adjacent the piezoelectric plate and a second layer over the first layer, wherein a width of the first layer is constant, and wherein a width of the second layer varies along a length of the at least one interleaved finger.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.