Patent · US Active

Electro-acoustic resonator and method of forming thereof

US11855607B2 · kind B2 · utility

0Cited by

0References

12Claims

0Family size

Assignee

RF360 Singapore Pte. Ltd. · SG

Inventors

Matthias HONAL · Munich, DE
Tomasz Jewula · Borgo San Lazzaro, DE
Pei Qiao · Ontario, US
Siew Li POH · Singapore, SG
Siew Ling Koh · Singapore, SG

Key dates

Filing date	Apr 24, 2019
Grant date	Dec 26, 2023
Priority date	—
Expiry date	Jul 30, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/25
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

An electro-acoustic resonator comprises a piezoelectric substrate on which an electrode structure is disposed. The electrode structure comprises a metal layer of aluminum and copper, a barrier layer forming a barrier against the diffusion of copper and another metal layer disposed on the barrier layer comprising aluminum. An AlCu intermetallic phase formed after an anneal is restricted to the portion beneath the barrier layer so that Galvano-corrosion of the electrode structure is avoided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.