Apparatus and method for recirculating fluids
US11858091B2 · kind B2 · utility
0Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2019 |
| Grant date | Jan 2, 2024 |
| Priority date | — |
| Expiry date | Oct 25, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01F2101/58
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.