Apparatus and method for in-situ optical inspection of laser-induced surface modifications and laser process control
US11860091B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Mar 1, 2021 |
| Grant date | Jan 2, 2024 |
| Priority date | — |
| Expiry date | Feb 23, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8867
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The embodiments disclose a method for in-situ inspection and processing of an object including providing a pulsed laser source during the in-situ inspection of a surface of the object for modifying at least one of an optical, mechanical, or chemical property of a first region of the surface, directing the laser source through an optics path to shape, position and focus a pulsed laser beam at the first region, directing a probe illumination light beam to the optics path to produce a combined and collinear optical light path of the probe illumination light beam and the pulsed laser beam to focus and deliver the combined and collinear optical light path at a same region on the surface, superimposing a first focus spot of the probe illumination light beam over a second focus spot of the pulsed laser beam on an illuminated region of the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.