Patent · US Active

Target material for deposition of molybdenum oxide layers

US11862444B2 · kind B2 · utility

0Cited by

5References

10Claims

0Family size

Assignee

Plansee SE · AT

Inventors

Enrico Franzke · Reutte, AT
Harald Koestenbauer · Breitenwang, AT
Joerg Winkler · Ullersdorf, DE
Dominik Lorenz · Birkenfeld, DE
Thomas Leiter · Peoria, US

Key dates

Filing date	Sep 5, 2018
Grant date	Jan 2, 2024
Priority date	—
Expiry date	Aug 7, 2039

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC04B2235/79
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

An electrically conductive, oxidic target material includes a proportion of substoichiometric molybdenum oxide phases of at least 60% by volume, an MoO2 phase in a proportion of 2-20% by volume, and optionally an MoO3 phase in a proportion of 0-20% by volume. The substoichiometric molybdenum oxide phase proportion is formed by one or more substoichiometric MoO3-y phase(s), where y is in each case in a range from 0.05 to 0.25. A process for producing the target material and a process for using the target material are also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.