Drilling device with controllable femtosecond laser processing taper and drilling process thereof
US11865643B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2020 |
| Grant date | Jan 9, 2024 |
| Priority date | — |
| Expiry date | Apr 1, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K31/12
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A drilling device with a controllable femtosecond laser processing taper includes a femtosecond laser and a precision motion table. A support mechanism is provided along the central axis of the precision motion table, and a clamp is provided on the top of the support mechanism. The output end of the femtosecond laser is provided with a beam expander. The output end of the beam expander is provided with a reflection mirror. The output end of the reflection mirror is provided with a beam scanning module. The output end of the beam scanning module is provided with a semi-focusing mirror. The output end of the semi-focusing mirror is provided with a semi-transmissive reflection mirror arranged at 45 degrees. The reflection output end of the semi-transmissive reflection mirror is provided with a high-precision three-dimensional on-line monitoring module, and the transmission output end of the semi-transmissive reflection mirror faces the clamp.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.