Patent · US Active

Ultrafast photonic micro-systems

US11866322B2 · kind B2 · utility

0Cited by

0References

18Claims

0Family size

Inventors

Jin Wang · Burr Ridge, US
Donald A. Walko · Woodridge, US
Pice Chen · Lemont, US
Il Woong Jung · Dublin, US
Daniel Lopez · Lemont, US

Key dates

Filing date	Mar 9, 2021
Grant date	Jan 9, 2024
Priority date	—
Expiry date	Sep 24, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG21K2201/062
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A microelectromechanical device for diffracting optical beams comprises a diffractive element suspended over a channel. The diffractive element is configured to receive an optical beam and diffract and/or transmit the optical beam based on an orientation of the diffractive element. At least one torsional actuator is operatively connected to the diffractive element. The at least one torsional actuator is configured to selectively adjust the orientation of the diffractive element. The diffractive element has a diffractive element resonant frequency that is nearly the same as a resonant frequency of the optical beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.