Field calibration for near real-time Fabry Perot spectral measurements
US11867615B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2022 |
| Grant date | Jan 9, 2024 |
| Priority date | — |
| Expiry date | Apr 14, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/127
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a tunable Fabry-Perot etalon, a detector, and a processor. The tunable Fabry-Perot etalon has a settable gap. The detector measures light intensity transmitted through the tunable Fabry-Perot etalon. The processor is configured to determine the calibrated spectral measurement, wherein the calibrated spectral measurement is based at least in part on a measurement set of detected light intensities for a selected set of settable gaps and a reconstruction matrix. The reconstruction matrix is based at least in part on calibration measurements using one or more field material targets, prior stored full calibrations for each of the one or more field material targets, and the selected set of settable gaps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.