Optical interference filter
US11867935B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Sep 28, 2021 |
| Grant date | Jan 9, 2024 |
| Priority date | — |
| Expiry date | Sep 28, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/266
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers, wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.