Apparatus for trapping of reaction by-product capable of expanding the area for collection by inducing gas flow
US11872515B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2022 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | Jun 3, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4412
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure relates to an apparatus for trapping of a reaction by-product capable of expanding the area for collection by inducing a gas flow, in which an internal trapping tower of the apparatus for trapping of a reaction by-product, which traps a reaction by-product contained in gas discharged from a process chamber during a semiconductor manufacturing process, is divided into multiple stages, the introduced gas is guided to a lower side of an inner region of an intermediate trapping unit provided as a space portion and discharged to an outer region while a trapping reaction occurs according to the reaction by-product trapping amount during a former part of a use duration time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.