Apparatus for trapping of reaction by-product with extended available collection area
US11872516B2 · kind B2 · utility
2Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2022 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | Jun 3, 2042 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure relates to an apparatus for trapping of a reaction by-product with an extended available collection area. The configuration of the present disclosure relates to an apparatus for trapping of a reaction by-product, which is configured to accommodate gas, which is discharged after a deposition process during a semiconductor manufacturing process, in a housing (1), heat the gas with a heater (2), trap a reaction by-product contained in the gas by using an internal trapping tower (3), and discharge only the gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.