Nano-electro-mechanical tags for identification and authentication
US11873214B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2021 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | Sep 10, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for fabricating nano-electro-mechanical tags for identification and authentication includes, in part, forming a protective layer above a substrate, forming a first conductive layer above the protective layer serving as a first electrode, forming a piezoelectric layer above the first conductive layer, forming a second conductive layer above the piezoelectric layer, patterning the second conductive layer to form a second electrode, patterning the piezoelectric layer to expose one or more portions of the first conductive layer, and forming one or more trenches that extends into a plurality layers formed above. In addition, a sacrificial layer can be formed above portions of the substrate, and the sacrificial layer can be removed by etching to release the nano-electro-mechanical tags from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.