Patent · US Active

Feedback system

US11875979B2 · kind B2 · utility

0Cited by

0References

17Claims

0Family size

Assignee

SOLERAS ADVANCED COATINGS BV · BE

Inventors

Wilmert De Bosscher · Drongen, BE
Ivan VAN DE PUTTE · Waregem, BE

Key dates

Filing date	May 17, 2018
Grant date	Jan 16, 2024
Priority date	—
Expiry date	Feb 2, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/26
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A feedback system for controlling properties of a single layer or multiple layer stack is applied on a substrate by means of a vacuum coating process controlled by a plurality of process controlling means. The system includes at least one monitoring device for at least implementing at least two distinct measurement techniques for determining measurement signals at each of a plurality of locations spatially distributed over the coated substrate; at least one processing unit adapted for at least receiving the measurement signals; and a controller for at least providing actuation signals for actuating the plurality of process controlling means.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.