Manufacturing apparatus and manufacturing method of porous glass base material
US11878929B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 14, 2021 |
| Grant date | Jan 23, 2024 |
| Priority date | — |
| Expiry date | Mar 3, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2207/88
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A manufacturing apparatus of porous glass base material includes deposition apparatuses that manufacture a porous glass base material by generating raw material particles from vaporized raw material compounds in an oxyhydrogen flame, and then depositing the generated raw material particles on a rotating starting material. The manufacturing apparatus includes a storage container that stores liquid raw material compounds for each compound, a vapor generation mechanism that vaporizes the raw material compounds, and a gas channel that supplies the vaporized raw material compounds to the deposition apparatuses. The gas channel includes a common gas channel shared to supply vaporized raw material compounds to the plurality of deposition apparatuses, and individual gas channels branched off from the common gas channel to supply vaporized raw material compounds to each of the deposition apparatuses individually. Each of the individual gas channels has a flow controller, a steam valve, and a valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.