Method of coating a superstrate
US11878935B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2022 |
| Grant date | Jan 23, 2024 |
| Priority date | — |
| Expiry date | Dec 27, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6715
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of coating a superstrate using a vacuum chuck containing ridges can comprise attaching the superstrate on the vacuum chuck; applying on the superstrate a liquid layer of a coating composition, the coating composition comprising a coating agent and a non-fluorinated solvent, wherein the non-fluorinated solvent has a boiling point of at least 165° C.; and solidifying the coating composition to form a solid coating layer. The material of the superstrate can have a thermal conductivity of not greater than 10 W/mK and the solid coating layer obtained after solidifying may comprise a smoothness value (SM) of not greater than 1%, the smoothness value being defined as SM=(CRD/CT)×100%, with CRD being a maximum roughness depth of the coating layer and CT an average thickness of the coating layer over a length of 10 mm of the solid coating layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.