Laser interferometer having a vibrator to modulate light for displacement and vibration velocity measurement
US11879730B2 · kind B2 · utility
1Cited by
1References
8Claims
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Key dates
| Filing date | Aug 24, 2021 |
| Grant date | Jan 23, 2024 |
| Priority date | — |
| Expiry date | Aug 24, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and an optical path length variable section that changes an optical path length of an optical path through which the third laser light propagates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.