Photoacoustic spectroscope having a vibrating structure as sound detector

US11879832B2 · kind B2 · utility

Assignee

• Hahn-Schickard-Gesellschaft für Angewandte Forschung e. V. · DE

Inventors

• Daniel Biesinger · Villingen-Schwenningen, DE
• Achim Bittner · Heilbronn, DE

Key dates

• Filing date: Feb 26, 2020
• Grant date: Jan 23, 2024
• Expiry date: Oct 8, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/02809
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates, in a first aspect, to a photoacoustic spectroscope for analyzing gas, comprising an infrared emitter (3), which can be modulated, an analysis volume (1), which can be filled with gas, and a sound pressure detector. The sound pressure detector comprises a structure (5) capable of vibrating, an actuator and a measurement unit, wherein the actuator is configured to actively excite vibration of the structure (5) capable of vibrating and the measurement unit can measure the vibration properties of the structure (5) capable of vibrating, which measurement depends on the formation of the sound pressure waves.In an additional aspect, the invention relates to a method for analyzing gas, comprising the provision of a photoacoustic spectroscope for analyzing gas, irradiating the gas with infrared radiation, modulated by a modulation frequency, to generate sound pressure waves, exciting the structure (5) capable of vibrating at an excitation frequency, measuring the vibration properties of the structure (5) capable of vibrating, which measurement depends on the sound pressure, and determining the sound pressure of the gas based on the measured vibration properties.