Acceleration sensor
US11879907B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2022 |
| Grant date | Jan 23, 2024 |
| Priority date | — |
| Expiry date | Aug 3, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides an acceleration sensor, including a sensing unit, a sensing unit includes a ring-shaped outer coupling unit; seesaw structures, including at least two and arranged on an inner side of the outer coupling unit; an inner coupling unit, including an inner coupling elastic beam connecting two adjacent seesaw structures; proof mass blocks fixed on the outer coupling unit or the inner coupling unit or the seesaw structures; an in-plane coupling elastic member elastically connecting the seesaw structures to the outer coupling unit; in-plane displacement detection devices arranged on the proof mass blocks and configured to detect movements of the proof mass blocks along the first direction and/or along the second direction; and out-of-plane displacement detection devices arranged on the outer coupling unit and/or the seesaw structures and/or the inner coupling unit configured to detect movements of the seesaw structures along the third direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.