Three-axis micromachined gyroscope
US11885618B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2021 |
| Grant date | Jan 30, 2024 |
| Priority date | — |
| Expiry date | Jul 8, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
One of the objects of the present invention is to provide a three-axis micromachined gyroscope which improves the detection sensitivity for detecting angular velocity. Accordingly, the present invention provides a three-axis micromachined gyroscope, including: a base; a vibration part suspended by the base, including a vibration assembly for receiving Coriolis force and generating a position change; a drive electrode for driving the vibration part; a detection part connected with the vibration part for detecting position change of the weights after receiving Coriolis force, and converting the position change of the weight into an electrical signal for outputting; and a swing center of each weight being outside the corresponding weight. When the three-axis micromachined gyroscope receives an angular velocity, the swinging weight is subjected to Coriolis force and a corresponding position change occurs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.