Sensor element
US11885765B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2021 |
| Grant date | Jan 30, 2024 |
| Priority date | — |
| Expiry date | Jul 14, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor element includes: an inner protective layer having a porosity of 30% to 65% on two main surfaces; an intermediate protective layer having a porosity of 25% to 80%, which is equal to or smaller than the porosity of the inner layer; and an outer protective layer surrounding an element base on an outermost periphery on the one end portion of the element, and having a porosity of 15% to 30%, which is smaller than the porosity of the intermediate layer, wherein these layers are laminated in this order at least in a range in which the at least one inner chamber is provided in the element base, the outer is in contact with the inner layer in a range in which the at least one inner chamber is not provided, and a difference of porosity between the inner layer and the outer layer is 10% to 50%.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.