X-ray sensor having a field limiting ring configuration
US11888015B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2019 |
| Grant date | Jan 30, 2024 |
| Priority date | — |
| Expiry date | Sep 28, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/802
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Disclosed is an X-ray sensor having an active detector region including detector diodes on its surface. The X-ray sensor further includes a junction termination surrounding the surface region including the detector diodes. The junction termination includes a guard arranged closest to the end of the surface region, a field stop outside the guard and at least two field limiting rings, FLRs arranged between the guard and the field stop. A first FLR is arranged at a distance Δ1 from the guard selected from the interval [4 μm; 12 μm], a second FLR is arranged at a distance Δ2 from the first FLR selected from the interval [6.5 μm; 14 μm], and wherein the distance Δ2 is larger than the distance Δ1. The proposed technology also provides a method for constructing such an X-ray sensor and an X-ray imaging system including an X-ray detector system that includes such X-ray sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.