Multi-layer vacuum electron device and method of manufacture
US11894208B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 12, 2021 |
| Grant date | Feb 6, 2024 |
| Priority date | — |
| Expiry date | May 15, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2229/582
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Vacuum electron devices (VEDs) having a plurality of two-dimensional layers of various materials are bonded together to form one or more VEDs simultaneously. The two-dimensional material layers are machined to include features needed for device operation so that when assembled and bonded into a three-dimensional structure, three-dimensional features are formed. The two-dimensional layers are bonded together into a sandwich-like structure. The manufacturing process enables incorporation of metallic, magnetic, ceramic materials, and other materials required for VED fabrication while maintaining required positional accuracy and multiple devices per batch capability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.