Multi-zone pedestal heater having a routing layer
US11895741B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 6, 2022 |
| Grant date | Feb 6, 2024 |
| Priority date | — |
| Expiry date | Jun 6, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/035
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.