Laser device and dehumidification management method for laser device
US11896929B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Nov 24, 2020 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Aug 28, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/4087
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A laser device includes a laser oscillator, a dehumidifier, and a controller controlling an operation of the dehumidifier. The controller controls the dehumidifier such that the dew point inside the laser oscillator is lower than the first dew point when a monolayer or less of water molecules is adsorbed, or such that the dew point is equal to or higher than the second dew point when more than a monolayer of water molecules is adsorbed inside the laser oscillator, and is lower than the third dew point at which the dew condensation starts to occur inside the laser oscillator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.