Optical apparatus and methods and computer program products useful for manufacturing same
US11899226B2 · kind B2 · utility
0Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2022 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Mar 9, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0977
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optical apparatus comprising a MEMS substrate having a surface; and a stack of optical coatings which is deposited on the MEMS substrate's surface and which modifies at least one property of light impinging on the stack.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.