Variable capacitor for RF power applications

US11901160B2 · kind B2 · utility

Assignee

• COMET AG · DE

Inventors

• Thomas Fink · Dayton, US
• Kevin Hauser · Karlsruhe, DE
• Holger Maune · Darmstadt, DE
• Daniel Kienemund · Klein-Gerau, DE
• Joachim Binder · Oberpurbach, DE
• Rolf Jakoby · Rosbach, DE
• Nicole Bohn · Karlsdorf-Neuthard, DE

Key dates

• Filing date: Mar 3, 2020
• Grant date: Feb 13, 2024
• Expiry date: Nov 23, 2040

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C04B2235/80
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A radio-frequency (RF) power variable capacitor capable of operating at, at least, 50 watts in the MHz range. The capacitor has a composite HDK-NDK ceramic dielectric. The HDK (high dielectric constant) component comprises an active matrix of barium strontium titanate, for example. Acoustic resonances are reduced or eliminated by the addition of a metal or metalloid oxide such as magnesium borate (NDK—low dielectric constant), which acts as an acoustic resonance reduction agent (ARRA) in the RF power domain. The acoustic resonances which previously occurred under bias voltage 500 V or 1100 V in prior art RF power variable capacitors are eliminated by the addition of the ARRA.