Barrier coatings
US11901169B2 · kind B2 · utility
0Cited by
91References
15Claims
0Family size
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Key dates
| Filing date | Feb 14, 2022 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Feb 22, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J43/246
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A secondary electron emissive layer resistant to infiltration and fouling. A barrier layer is formed by atomic layer deposition. The barrier layer may be an emissive layer and/or an interlayer. The barrier layer may form an interlayer that is a part of an electron amplifier positioned between an emissive layer and a resistive layer. The barrier layer is resistive to fluorine migration from either the emissive layer or the resistive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.