Contaminant collection on SOI
US11901462B2 · kind B2 · utility
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37Claims
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Assignee
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Key dates
| Filing date | Feb 5, 2022 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Feb 5, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/01
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit includes an SOI substrate having a semiconductor layer over a buried insulator layer; the semiconductor layer contains white space regions that include a PWELL region. An electronic device includes an NWELL region in the semiconductor layer, a dielectric over the NWELL region, and a polysilicon plate over the dielectric. A sacrificial NWELL ring is adjacent to and separated from the NWELL region by a first gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.