Cathode arc source, filters thereof and method of filtering macroparticles
US11903116B2 · kind B2 · utility
0Cited by
2References
16Claims
0Family size
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Key dates
| Filing date | Jun 18, 2021 |
| Grant date | Feb 13, 2024 |
| Priority date | — |
| Expiry date | Jun 18, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3402
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A filter (104a, 104b, 108) for a cathode arc source comprises: a filter duct having at least one bend (104a, 104b), and a first magnetic field source for steering plasma through the filter duct for removal of macroparticles from the plasma; wherein the apparatus comprises a second magnetic field source (108) which is rotatably mounted surrounding a portion of the filter duct. Cathode arc sources (102) and cathode arc deposition apparatuses (106) comprise the filters described herein, and methods of filtering macroparticles from a beam of plasma emitted from a cathode arc source use the filters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.