Micromachined ultrasonic transducers with non-coplanar actuation and displacement
US11904357B2 · kind B2 · utility
0Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 22, 2020 |
| Grant date | Feb 20, 2024 |
| Priority date | — |
| Expiry date | Jun 14, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B2201/76
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A micromachined ultrasonic transducers with non-coplanar actuation and displacement comprising a plate with a protruding center mass, a substrate with a center depression configured to accept the center mass, a first electrode coupled to a non-horizontal edge surface of the center mass, and a second electrode coupled to a non-horizontal edge surface of the center depression. The plate may be coupled to the substrate at least along an outer perimeter area of the plate and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.