Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device
US11905163B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2019 |
| Grant date | Feb 20, 2024 |
| Priority date | — |
| Expiry date | Apr 24, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/036
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-nano channel structure, a method for manufacturing the micro-nano channel structure, a sensor, a method for manufacturing the sensor, and a microfluidic device are provided by the embodiments of the present disclosure. The micro-nano channel structure includes: a base substrate; a base layer, on the base substrate and including a plurality of protrusions; and a channel wall layer, on a side of the plurality of the protrusions away from the base substrate, and the channel wall layer has a micro-nano channel; a recessed portion is provided between adjacent protrusions of the plurality of the protrusions, and an orthographic projection of the micro-nano channel on the base substrate is located within an orthographic projection of the recessed portion on the base substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.