System and method of continuous, vibration-less, and bi-directional MEMS mirror motion via periodic driving force for rapid data acquisition
US11905165B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Nov 16, 2020 |
| Grant date | Feb 20, 2024 |
| Priority date | — |
| Expiry date | May 6, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/047
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a MEMS device and related methods comprising a mirror for the measuring of light frequency. The MEMS mirror may rotate around a pivot point and is driven by a periodic force for continuous bi-directional motion without transient vibrations. The periodic force may further comprise transient functions comprising special waveforms when at the turn-around point of the bi-directional rotation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.