Method and control device

US11905592B2 · kind B2 · utility

Inventors

• Ralf Biedermann · Dresden, DE
• Bernd Teichert · Dresden, DE
• Thomas Meyer · Dresden, DE
• Torsten Dsaak · Dresden, DE

Key dates

• Filing date: Sep 2, 2020
• Grant date: Feb 20, 2024
• Expiry date: Dec 31, 2041

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/548
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In various aspects of the disclosure, a method of operating a process group that performs at least a first reactive coating process and a second reactive coating process may comprise: coating of a substrate by means of the first reactive coating process and by means of the second reactive coating process; closed-loop control of the process group by means of a first manipulated variable of the first coating process and a second manipulated variable of the second coating process and using a correction element; wherein the correction element relates the first manipulated variable and the second manipulated variable to one another in such a way that their control values are different from one another.