Variable-area comb capacitor-based MEMS relative gravimeter probe and gravimeter
US11906693B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2022 |
| Grant date | Feb 20, 2024 |
| Priority date | — |
| Expiry date | Aug 29, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01V7/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gravimeter probe includes a spring structure, a proof mass, movable comb fingers, fixed comb fingers, and an outer frame. A fixed end of the spring structure is arranged on the outer frame and a free end thereof is connected to the proof mass. The movable comb fingers are arranged on upper and lower surfaces of the proof mass, and the fixed comb fingers are correspondingly arranged on the outer frame. Each of the movable comb fingers and the fixed comb fingers has a special-shaped comb finger structure. The special-shaped comb finger structure includes a comb finger bottom portion and a comb finger top portion, and the width of the comb finger bottom portion is smaller than the width of the comb finger top portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.