Turnable free space optical filters
US11906784B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 11, 2022 |
| Grant date | Feb 20, 2024 |
| Priority date | — |
| Expiry date | Apr 11, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/141
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical apparatus, comprising a semiconductor substrate, a dielectric layer located on the semiconductor substrate, wherein a membrane portion of the dielectric layer is located over a cavity in a surface of the semiconductor substrate, a resistive heater located on the membrane portion, the resistive heater being controllable by a current applied to the resistive heater and an etalon optical filter located on the resistive heater and over the cavity, an optical passband of the etalon optical filter being wavelength tunable by the resistive heater. A method of manufacturing the optical apparatus is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.