Micromachined ultrasonic transources with dual out-of-plane and in-plane actuation and displacement
US11911792B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2021 |
| Grant date | Feb 27, 2024 |
| Priority date | — |
| Expiry date | Sep 29, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B2201/51
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A capacitive transducer is provided. The capacitive transducer includes a plate including a protruding center mass and a substrate with a center depression configured to accept the center mass. The capacitive transducer also includes a first electrode coupled to a non-horizontal edge surface of the center mass and a second electrode coupled to a non-horizontal edge surface of the center depression. The capacitive transducer further includes a third electrode coupled to a horizontal edge surface of the center mass and a fourth electrode coupled to a horizontal edge surface of the center depression. The plate is coupled to the substrate at least along an outer perimeter area of the plate and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.