Preventive maintenance method for chamber of metal etching machine
US11911809B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Oct 3, 2022 |
| Grant date | Feb 27, 2024 |
| Priority date | — |
| Expiry date | Oct 3, 2042 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present application discloses a preventive maintenance method for a chamber of a metal etching machine. An optimized burning cleaning recipe is added before the chamber is opened, and metal substances remaining on the surface of an electrostatic chuck are removed by adopting a cleaning/pumping down multi-step alternate method. Before the chamber is opened for preventive maintenance, the phenomenon of metal particles remaining on the surface of the electrostatic chuck can be significantly improved, thus solving the downtime problem caused by abnormal backside helium and ensuring the stability of mass production.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.