Patent · US Active

Method and apparatus for controlling hybrid process recipes, and medium

US11914344B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

CHANGXIN MEMORY TECHNOLOGIES, INC. · CN

Inventors

Xingle Zhao · Hefei, CN
Yuming Wang · Beijing, CN
Zhengqing SUN · Hefei, CN

Key dates

Filing date	Apr 11, 2022
Grant date	Feb 27, 2024
Priority date	—
Expiry date	Aug 4, 2042

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P90/02
WIPO fieldControl
WIPO sectorInstruments

Abstract

Embodiments of the present disclosure provide a control method and apparatus for hybrid process recipes, and a device and a medium. The control method includes: acquiring hybrid process recipe operation groups associated with process recipes operated by etching chambers of an etching machine, where different process recipes correspond to different hybrid process recipe operation groups; acquiring a switching rule of different hybrid process recipe operation groups; and controlling, based on a reserved process recipe for a real-time reserved demand of a target etching chamber and a requirement of the switching rule, the etching machine to automatically switch to a target hybrid process recipe operation group associated with the reserved process recipe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.