Resonant light scanner having drive-frequency control based on an electrical parameter
US11914768B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2022 |
| Grant date | Feb 27, 2024 |
| Priority date | — |
| Expiry date | Jul 27, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2027/0178
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Systems and methods for determining the resonant frequencies of at least one axis of a two-axis resonant light scanner based on a measured resistance of at least a portion of one of the axes are disclosed. Precise knowledge of the resonant frequencies of each axis enables quasi-closed-loop operation of a light scanner, wherein the resonant frequencies of its axes can be periodically updated to ensure the proper drive frequencies are used. Furthermore, by determining the relationship between the measured resistance and scanner angle, calibration of the scanner is facilitated and even enabled at the wafer level during fabrication. In some cases, it also enables real-time monitoring of scanner position. Scanners in accordance with the present disclosure are suitable for use in any application that requires one or more reflective elements that can be scanned or steered in at least one dimension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.