Automatic alignment method of high-pressure gas container
US11927309B2 · kind B2 · utility
1Cited by
2References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 10, 2018 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Jul 20, 2041 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2270/0518
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Disclosed is an automatic alignment method of a high-pressure gas container in which a high-pressure gas container is loaded on a lift of a cabinet so as to supply a gas from a fabrication (FAB) process facility of a semiconductor to a wafer production line, and then, the high-pressure gas container loaded on the lift is raised, and an end cap of the high-pressure gas container and the center of a connector holder of a gas pipe are automatically aligned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.