Chip-level resonant acousto-optic coupled solid state wave gyroscope
US11927444B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2021 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Jan 18, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/725
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a chip-level resonant acousto-optic coupling solid-state wave gyroscope based on MEMS technology. A surface acoustic progressive wave mode sensitive structure and a micro-ring resonant cavity optical detection structure are combined in the gyroscope. Through acousto-optic effect, mechanical strain of the device crystal caused by wave vibration of a primary surface acoustic wave and a secondary surface acoustic wave caused by Coriolis force is converted into a variation in the refractive index of an optical waveguide etched on the device, so that the optical signal transmitted in the waveguide diffracts, thereby generating frequency modulation. Meanwhile, a micro-ring resonant cavity using the resonance principle peels off the frequency change introduced by the primary surface acoustic wave, and obtains an output signal containing external angular velocity information. Based on the proportional relationship between the detection resolution and the quality factor of the micro-ring resonant cavity, the order of magnitude of the interface detection resolution is improved, and the performance indicators of the gyroscope are simultaneously optimized in terms of improving sen…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.