Physical quantity measurement device including a thermal flow rate sensor with a ventilation flow path
US11927466B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2019 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Jan 6, 2041 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF02D41/30
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A physical quantity measurement device is configured to seal a cavity portion on a back surface side of a diaphragm of a thermal air flow rate sensor while improving measurement accuracy. The device may include a lead frame having a mounting surface on which a flow rate sensor which is the thermal air flow rate sensor is mounted, and a flow passage forming member disposed on a back surface opposite to the mounting surface of the lead frame. A ventilation flow path is formed by a first through hole in communication with a cavity portion of the flow rate sensor, a second through hole provided in the lead frame and opened in the mounting surface, and a connection flow path that is defined between the lead frame and the flow passage forming member and connecting the first through hole and the second through hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.