Sensor and a system
US11927492B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2020 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Jun 19, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/2281
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor includes a metal object and a thin film stack formed on at least a part of a surface of the metal object. The thin film stack has an electrically isolating film and a metallic film thereon. A first electrical conductor is defined in the metallic film and is electrically isolated from the metal object and has, in a first end, a connection point connected to a first terminal via a wire and, in a second end, a sensor structure defined in the metallic film. The sensor structure includes a junction of the metallic film penetrating the electrically isolating film to the metal object forming a thermocouple and a metal object terminal connected to a connection point of the metal object via a wire. The connection points of the first electrical conductor and of the metal object are adjacent to and in an isothermal relation with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.