Method of scanning an optical beam using an acousto-optic deflector driven by chirped acoustic signals
US11927873B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2019 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Apr 21, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The object of the invention relates to a method for scanning with an optical beam (50) using a first acousto-optic deflector (15, 15′) having an optical axis along a Z-axis and at least one acousto-optic crystal layer (14), involving directing the optical beam (50) in the first acousto-optic deflector (15, 15′), and deflecting the optical beam (50) along an X-axis perpendicular to the Z-axis by means of the first acousto-optic deflector (15, 15), during which generating a plurality of acoustic chirp signals (30) in the at least one acousto-optic crystal layer (14) of the acousto-optic deflector (15, 15′) by—generating a first acoustic chirp signal (30a) having a duration of τ in the acousto-optic crystal layer (14), then—generating a second acoustic chirp signal (30b) in the acousto-optic crystal layer (14) within a τ period of time counted from the start of the generation of the first acoustic chirp signal (30a).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.