Transversely-excited film bulk acoustic resonator with reduced spurious modes
US11929727B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 17, 2021 |
| Grant date | Mar 12, 2024 |
| Priority date | — |
| Expiry date | Aug 1, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic filters, resonators and methods are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate includes a diaphragm that spans a cavity in the substrate. A conductor pattern includes an interdigital transducer (IDT) with interleaved parallel fingers on the diaphragm. A center-to-center spacing between two adjacent parallel fingers is greater than or equal to 2.5 times a thickness of the diaphragm and less than or equal to 15 times the diaphragm thickness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.