Patent · US Active

Surface acoustic wave resonator with piston mode design and electrostatic discharge protections

US11929734B2 · kind B2 · utility

0Cited by

1References

29Claims

0Family size

Assignee

RF360 Singapore Pte. Ltd. · SG

Inventors

Volker Schulz · Heppenheim, DE
Philipp Michael Jaeger · Munich, DE

Key dates

Filing date	Jan 29, 2021
Grant date	Mar 12, 2024
Priority date	—
Expiry date	Jun 12, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/6406
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Certain aspects of the present disclosure provide a surface acoustic wave (SAW) resonator with piston mode design and electrostatic discharge (ESD) protections. An example electroacoustic device generally includes a piezoelectric material and a first electrode structure disposed above the piezoelectric material. The first electrode structure comprises first electrode fingers arranged within an active region having a first region and a second region. At least one of the first electrode fingers has at least one of a different width or a different height in the first region than in the second region, and the first electrode fingers comprise a first electrode finger that has a width or height in the second region that is less than a corresponding width or height of the at least one of the first electrode fingers in the second region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.